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Entegris is a leader in the semiconductor industry for gas purification and we are
leveraging our expertise into the Hydrogen and Fuel Cell market. We have the ability
to take “5 9’s” gas and purify it to “9 9’s” using our inorganic catalyst media.
Specifically in hydrogen, we remove contaminants such as O2, CO2, CO, and H2O to
<1 part per billion. Additionally, we can remove hydrocarbons, ammonia, NOx, H2S,
O3, sulfur compounds, phosphorous, and heavy metals.
Gas supplied in bulk may not have the cleanliness required for optimal lifetime.
Purification will protect delicate components from impurity spikes within a tank
and during tank changeouts, contributions from fittings, pumps, etc., and ensure
consistent gas quality to your process.
We have point-of-use purifiers that do not require power or heat and are completely
regenerable at our San Diego facility for lower cost-of-ownership. We also have
auto-regeneration units for in-situ uninterrupted purification. Both of these options
are currently available up to 1000slm (~2400scfh / ~70Nm3/hr). In 2008, we will
have bulk auto-regen units up to 20000slm.
Entegris can also purify air, oxygen, and inert gases like nitrogen.
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